Princeton University
Micro/Nanofabrication Center (MNFC)

The Micro / Nanofabrication Center (MNFC) has over 15,000 sq. ft. of ISO 5 – 6 cleanroom with over 75 tools to support researchers’ start-of-the-art fabrication needs. Contiguous with the main cleanroom is a 1,500 sq. ft. undergraduate teaching lab committed to educating and training. Part of the Princeton Materials Institute (PMI), adjacent core facilities include the Imaging & Analysis Center (IAC) and the Advanced MicroAssembly and Packaging (AMAP) labs. With a professional and experienced staff of 7 to support your fabrication needs, the MNFC is the preeminent cleanroom for researchers in Princeton University and external users from industry and academia in the New Jersey and Mid-Atlantic region.

The MNFC supports a full suite of lithography tools including two electron-beam lithography systems, direct-write and contact photolithography, 3D-printing, and all required support tools for creating patterns from the meso to the nanoscale. Further processing equipment includes a wide range of evaporators, sputtering systems, atomic-layer deposition (ALD), chemical vapor deposition (CVD), and RIE and ICP-RIE based etching systems for a variety of materials.

In addition to more typical electronic and quantum device development, the MNFC also supports fabrication in a variety of areas including advanced diamond etching, silicon and III-V processing, Micro Electro Mechanical Systems (MEMS), photonics, microfluidics, detectors for high-energy physics and cosmology, structures for analysis in chemistry and life sciences, and much more.
Adjacent PMI core facilities include the Imaging & Analysis Center (IAC) with world-class electron microscopy and advanced material analysis tools, as well as the Advanced MicroAssembly and Packaging (AMAP) labs, providing a full suite of tools for advanced device fabrication, packaging, and material analysis.